IEEE - Institute of Electrical and Electronics Engineers, Inc. - Implementation of Fast Wafer Level Reliability Monitoring Strategy for Wafer Fab Process Monitoring

Student Conference on Research and Development - SCOReD 2007

Author(s): Lai Chin Yung ; Yvonne Yeo Chii ; Ng Hong Seng ; Tan Hong Mui
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2007
Conference Location: Selangor, Malaysia, Malaysia
Conference Date: 12 December 2007
Page(s): 1 - 3
ISBN (CD): 978-1-4244-1470-3
ISBN (Paper): 978-1-4244-1469-7
DOI: 10.1109/SCORED.2007.4451389
Regular:

In wafer foundry it is important to make use of reliability monitoring strategy as part of process monitoring. A fast reliability monitoring strategy has been developed, which enables a fast... View More

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