IEEE - Institute of Electrical and Electronics Engineers, Inc. - Silicon Fishbone-Shaped Resonant-Frequency-Tunable MEMS Resonator

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): S. Makita ; H. Tanigawa ; K. Suzuki
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 500 - 501
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456323
Regular:

In this study, a silicon fishbone-shaped resonant-frequency-tunable MEMS resonator is designed and fabricated. The resonator can vibrate in larger amplitude than conventional... View More

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