IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication of bottom-up gas sensors based on individual SnO 2 nanowires and suspended microhotplates

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): S. Barth ; F. Hernandez-Ramirez ; J.D. Prades ; R. Jimenez-Diaz ; O. Casals ; A. Tarancon ; M.A. Juli ; S. Mathur ; A. Helwig ; J. Spannhake ; G. Miiller
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 490 - 491
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456318
Regular:

In this work, bottom-up devices based on individual monocrystalline SnO2 nanowires (NWs) were fabricated using FIB nanolithography on top of suspended microhotplates, with integrated... View More

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