IEEE - Institute of Electrical and Electronics Engineers, Inc. - A MEMS Probe Card with High Aspect Ratio Electroplated Posts

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): Bong-Hwan Kim ; Bum-Jin Park ; Byung-Hoon Kum ; Jong-Bok Kim
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 482 - 483
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456314
Regular:

In this paper, a MEMS probe card developed with high aspect ratio post in order to implement high speed and high frequency testing and reduce thermal deformation effect during hot test of device... View More

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