IEEE - Institute of Electrical and Electronics Engineers, Inc. - Using FIB SEM to control the critical dimensions of nano-structured materials

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): O. Wilhelmi ; S. Reyntjens ; D.J. Stokes ; L. Roussel ; D.H.W. Hubert
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 474 - 475
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456310
Regular:

Application of state-of-the-art focused ion beam technology (FIB), in combination with high-performance scanning electron microscopy (SEM), gives the ability to perform advanced nanofabrication,... View More

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