IEEE - Institute of Electrical and Electronics Engineers, Inc. - Investigation of Dual-Focal-Points Optical System with Bright-Field Illumination and Image Processing for UV Nanoimprint Alignment

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): N. Suehira ; A. Terasaki ; S. Okushima ; J. Seki ; H. Ono
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 440 - 441
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456293
Regular:

In this study, a new wide-gap alignment technique was developed for the investigation of dual-focal-points optical system with bright field illumination and image processing for UV nanoimprint.

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