IEEE - Institute of Electrical and Electronics Engineers, Inc. - Two-dimensional Arrangement of Vertically Oriented Cylindrical Domains of Diblock Copolymers using Graphoepitaxy with Artificial Guiding Pattern Layout

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): T. Yamaguchi ; M. Edamoto ; S. Warisawa ; S. Ishihara ; H. Yamaguchi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 434 - 435
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456290
Regular:

In this paper, we demonstrate that a two-dimensional arrangement of vertical cylindrical domains of asymmetric poly(styrene-b-methyl methacrylate) (PSt-b-PMMA) is achieved by graphoepitaxy... View More

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