IEEE - Institute of Electrical and Electronics Engineers, Inc. - Ultraviolet Nanoimprint Lithography Applicable to Thin-Film Transistor Liquid-Crystal Display

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): Eung-sug Lee ; Jun-ho Jeong ; Ki-don Kim ; Dae-geun Choi ; Jun-hyuk Choi ; Dong-Il Lee ; A.O. Altuna ; Soon-won Lee
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 422 - 423
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456284
Regular:

In this study, an ultraviolet nanoimprint lithography (UV-NIL) process using a quartz stamp in a low vacuum environment is presented. Experimental results demonstrate the potential of the proposed... View More

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