IEEE - Institute of Electrical and Electronics Engineers, Inc. - High-Speed Scanning Electron Microscopy using Distributed-axis Electron Optics

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): R.F. Pease ; D.S. Pickard ; S. Tanimoto
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 414 - 415
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456280
Regular:

In this paper, distributed-axis technology is applied to high-speed scanning electron microscopy for large scale inspection and metrology of nanostructures. Simulated results indicate that each... View More

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