IEEE - Institute of Electrical and Electronics Engineers, Inc. - Novel forming for fabrication of micro V-cut grooves using the optical-element

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): Ying-Jui Huang ; Tien-Li Chang ; Hwai-Pwu Chou ; Fuh-Yu Chang ; Cheng-Hsuan Lin
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 388 - 389
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456267
Regular:

This paper presents a novel photolithography fabrication process for building V-cut grooves utilizing controlled light source refraction. This fabrication method is an important platform for... View More

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