IEEE - Institute of Electrical and Electronics Engineers, Inc. - Helical Patterning onto Fine Pipes and Fabrication of Long-span Micro-coils

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): M. Katayama ; T. Horiuchi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 372 - 373
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456259
Regular:

In this research, 3-dimensional laser scan patterning onto extremely fine pipes is investigated and minute micro-coils are fabricated by etching the helically patterned fine pipes.

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