IEEE - Institute of Electrical and Electronics Engineers, Inc. - Various Fatigue Testing of Polysilicon Microcantilever Beam in Bending

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): Hong Hocheng ; Jeng-Nan Hung
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 356 - 357
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456251
Regular:

In this study, the polysilicon microcantilever beams are successfully fabricated and fully suspended. The results of fatigue life in bending are obtained by both microactuator testing method, MTS... View More

Advertisement