IEEE - Institute of Electrical and Electronics Engineers, Inc. - Integration of Ag/AgCl reference electrode with MOSFET-type biosensor

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): Ho-Jin Choi ; Jang-Kyoo Shin ; Pyung Choi ; Hong-Kun Lyu ; K. Sawada ; M. Ishida
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 352 - 353
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456249
Regular:

In this study, a CMOS process-compatible MOSFET-type biosensor with a built-in Ag/AgCI thin film reference electrode have been fabricated on the same chip. Au was used as the gate metal of the... View More

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