IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication of photonic crystal-patterned light emitting diodes using nanoimprint lithography

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): Kyeong-Jae Byeon ; Seon-Yong Hwang ; Heon Lee
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 316 - 317
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456231
Regular:

This work reports on the economical and effective fabrication process of photonic crystal patterns on GaN-based light emitting diode (LED) structures using nanoimprint lithography (NIL) and... View More

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