IEEE - Institute of Electrical and Electronics Engineers, Inc. - Effect of a photo-crosslinkable chemisorbed monolayer on thermal nanoimprinting of a poly(styrene) thin film on a gold substrate

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): H. Oda ; T. Ohtake ; T. Takaoka ; M. Nakagawa
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 308 - 309
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456227
Regular:

In this study, a photo-crosslinkable chemisorbed monolayer is designed between metal and resist layers to carry out thermal nanoimprinting of a non-polar poly(styrene) (PSt) thin film on a gold... View More

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