IEEE - Institute of Electrical and Electronics Engineers, Inc. - Effect of UV Irradiation on Organic-SOG Patterns Replicated by Room-Temperature Nanoimprinting

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): K. Nakamatsu ; Y. Takeuchi ; N. Taneichi ; S. Matsui
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 302 - 303
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456224
Regular:

Organic spin on glass(O-SOG) is very useful owing its unique property of enabling imprinting at room temperature as well as hydrogen silsesquioxane that we have used. This means that... View More

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