IEEE - Institute of Electrical and Electronics Engineers, Inc. - Investigation on Laser Assisted Direct Imprinting Parameters for Fabricating Micro- and Nano- Structures

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): Fei-Bin Hsiao ; Yung-Chun Lee ; Cheng-Hsin Chuang ; Jun-Yi Ruan
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 298 - 299
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456222
Regular:

The laser assisted direct imprint (LADI) technique can be perfectly carried out by using the quartz nano-negative molds. The effects of feature size are experimental verified by micro-positive... View More

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