IEEE - Institute of Electrical and Electronics Engineers, Inc. - The complex mechanisms of Ion Beam Induced Deposition

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): Ping Chen ; P.F.A. Alkemade ; H.W.M. Salemink
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 260 - 261
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456203
Regular:

In this paper, Ion Beam Induced Deposition (IBID) mechanisms for nanostructure growth are investigated in terms of the contribution of secondary atoms, secondary electrons, and primary ions.

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