IEEE - Institute of Electrical and Electronics Engineers, Inc. - Development of focused-ion-beam (FIB) machining systems for fabricating 3-D micro- and nano- structures

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): Sang-Jae Kim ; K. Iwasaki
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 258 - 259
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456202
Regular:

This study has developed a three-dimensional (3D) focused-ion-beam (FIB) etching system and a method for machining 3D sensor structures. The FIB etching equipment enables precision cuts to be made... View More

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