IEEE - Institute of Electrical and Electronics Engineers, Inc. - Feasibility and study on rapid fabrication of 2D photonic crystal slab waveguides by combining near-field phase-shifting contact lithography and interference lithography

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): Yung-Pin Chen ; Cai-Xia Yan ; L.A. Wang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 182 - 183
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456164
Regular:

We propose a potentially rapid method that combines near-field phase-shifting contact lithography (NFPSCL) and IL to fabricate 2D photonic crystal slab waveguides This technique provides an... View More

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