IEEE - Institute of Electrical and Electronics Engineers, Inc. - TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)-metal precursors

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): M. Takeguchi ; M. Shimojo ; M. Tanaka ; K. Mitsuishi ; K. Furuya
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 176 - 177
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456161
Regular:

In this paper, nanowires were fabricated by electron beam induced deposition using tetrakis(trifluorophosphite)-metal precursors. The microstructure and composition of the nanostructure... View More

Advertisement