IEEE - Institute of Electrical and Electronics Engineers, Inc. - Localized deposition of metallic molybdenum particles in ambient air using atmospheric-pressure microplasma

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): Y. Shimizu ; K. Koga ; T. Sasaki ; D. Mariotti ; K. Terashima ; N. Koshizaki
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 174 - 175
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456160
Regular:

The authors report the details of the deposition process and the unique structure of metallic Mo particles obtained under specific conditions. Results indicated that the surface of the... View More

Advertisement