IEEE - Institute of Electrical and Electronics Engineers, Inc. - Effect of Annealing and Electron Irradiation on Young's Modulus of Amorphous Carbon Pillars Grown by FIB-CVD

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): R. Ueki ; J.-i. Fujita ; T. Ichihashi ; T. Kaito ; S. Matsui
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 168 - 169
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456157
Regular:

The paper reports on the effect of vacuum annealing and and electron shower irradiation on the Young's modulus of amorphous carbon pillars grown by focused-ion-beam-induced chemical vapor... View More

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