IEEE - Institute of Electrical and Electronics Engineers, Inc. - Surface modification of a diamond-like carbon thin film using hyperthermal fluorine beams

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): N. Yamada ; K. Kanda ; K. Yokota ; M. Tagawa ; M. Niibe ; Y. Haruyama ; S. Matsui
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 166 - 167
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456156
Regular:

Surface modification of a diamond-like carbon (DLC) thin film was performed using hyperthermal fluorine beams. After the irradiation of fluorine beam, the contact angle of a water drop against the... View More

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