IEEE - Institute of Electrical and Electronics Engineers, Inc. - Self-assembled Zn/ZnO dots on silicon by RF magnetron sputter

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): Yu-Han Liang ; Chuan-Pu Liu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 158 - 159
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456152
Regular:

Summary form given only. ZnO possesses superior semiconductor properties and chemical stability and thus has attracted much attention for potential applications in piezoelectric and optoelectronic... View More

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