IEEE - Institute of Electrical and Electronics Engineers, Inc. - Study on the reaction of acid generators with epithermal electrons

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): K. Natsuda ; T. Kozawa ; A. Saeki ; S. Tagawa ; T. Kai ; T. Shimokawa
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 78 - 79
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456113
Regular:

In this study, the reaction of typical acid generators with epithermal electrons by observing the decrease in the initial yield of THF solvated electrons caused by the addition of acid generators... View More

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