IEEE - Institute of Electrical and Electronics Engineers, Inc. - Collection field dependence of charging-up of insulators in low voltage scanning electron microscope

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): T. Maekawa ; H. Tanaka ; M. Kotera
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 74 - 75
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456111
Regular:

We have studied time dependent charging of insulators by electron beam irradiation. The positive charging at low voltage SEM is caused by the fact that total SE yield is above unity, but the yield... View More

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