IEEE - Institute of Electrical and Electronics Engineers, Inc. - Three-dimensional Nanomechanical Device Fabrication by FIB-CVD

Microprocesses and Nanotechnology 2007. 20th International Microprocesses and Nanotechnology Conference

Author(s): S. Matsui
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2007
Conference Location: Kyoto, Japan
Conference Date: 5 November 2007
Page(s): 18 - 19
ISBN (Paper): 978-4-9902472-4-9
DOI: 10.1109/IMNC.2007.4456083
Regular:

Three-dimensional nanostructure fabrication has been demonstrated by 30 keV Ga+ FIB-CVD using a phenanthrene (C14H10) source as a precursor. The characterization... View More

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