IEEE - Institute of Electrical and Electronics Engineers, Inc. - Preparation of Nuclear Accelerator Targets by Focused Ion Beam Sputter Deposition

Author(s): H. Folger ; J. Klemm ; M. Muller
Sponsor(s): IEEE Nuclear and Plasma Sciences Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 1983
Volume: 30
Page(s): 1,568 - 1,572
ISSN (Paper): 0018-9499
ISSN (Online): 1558-1578
DOI: 10.1109/TNS.1983.4332586
Regular:

A duoplasmatron ion source with einzellens extraction was used to prepare focused beams of 10-30 kV of Ar ions with intensities of 1 mA. An em/m-analysis was performed to study the general... View More

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