IEEE - Institute of Electrical and Electronics Engineers, Inc. - Method of Overall Consumables Effectiveness

2007 International Symposium on Semiconductor Manufacturing

Author(s): K. Kikuchi ; T. Kikuchi ; T. Takai
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2007
Conference Location: Santa Clara, CA, USA
Conference Date: 15 October 2007
Page(s): 1 - 4
ISBN (CD): 978-1-4244-1142-9
ISBN (Paper): 978-1-4244-1141-2
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.2007.4446819
Regular:

Creating a new methodology, the OCE (Overall Consumables Effectiveness), will reduce the cost of Gases and Chemicals for semiconductor processing applying the OEE methods to cost reduction by... View More

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