IEEE - Institute of Electrical and Electronics Engineers, Inc. - Novel dispatching rule of phase-mix and product-mix for cost-free productivity improvement

2007 International Symposium on Semiconductor Manufacturing

Author(s): T. Saito ; Y. Satou ; S. Arima
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2007
Conference Location: Santa Clara, CA, USA
Conference Date: 15 October 2007
Page(s): 1 - 4
ISBN (CD): 978-1-4244-1142-9
ISBN (Paper): 978-1-4244-1141-2
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.2007.4446815
Regular:

Wafer factories have complex manufacturing process lines. In wafer process lines, different product type WIPs or different process phase WIPs or both may exist in same work center. Machines should... View More

Advertisement