IEEE - Institute of Electrical and Electronics Engineers, Inc. - Impact of speed on the performance of vehicle-free transport

2007 International Symposium on Semiconductor Manufacturing

Author(s): M.D. Brain ; P. Lin
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2007
Conference Location: Santa Clara, CA, USA
Conference Date: 15 October 2007
Page(s): 1 - 3
ISBN (CD): 978-1-4244-1142-9
ISBN (Paper): 978-1-4244-1141-2
ISSN (Paper): 1523-553X
DOI: 10.1109/ISSM.2007.4446799
Regular:

Automated material handling systems (AMHS) are the backbone of a 300 mm fab. Today's AMHS is required to support dynamic movement demands ranging from 1,000 to as high as 10,000 moves per hour.... View More

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