IEEE - Institute of Electrical and Electronics Engineers, Inc. - Advanced femtosecond lasers in Manufacturing

2007 Quantum Electronics and Laser Science Conference

Author(s): Hitoshi Sekita ; Tomohiro Imahoko ; Kazuya Takasago ; Masanao Kamata ; Susumu Tsujikawa ; Tetsumi Sumiyoshi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2007
Conference Location: Baltimore, MD, USA, USA
Conference Date: 6 May 2007
Page(s): 1
ISBN (CD): 978-1-55752-834-6
DOI: 10.1109/QELS.2007.4431528
Regular:

We solved the stability, life-time and cost problems of femtosecond lasers and opened the door to their huge commercial market in near future. Femtosecond lasers will be used in the semiconductor... View More

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