IEEE - Institute of Electrical and Electronics Engineers, Inc. - High power EUVL source demonstration of tin-doped droplet laser plasma generated by industrial solid state lasers

2007 Quantum Electronics and Laser Science Conference

Author(s): K. Takenoshita ; T. Schmid ; S. A. George ; J. Cunado ; M. C. Richardson ; B. Fulford ; I. Hendarson ; N. Hay ; S. Ellwi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2007
Conference Location: Baltimore, MD, USA, USA
Conference Date: 6 May 2007
Page(s): 1
ISBN (CD): 978-1-55752-834-6
DOI: 10.1109/QELS.2007.4431518
Regular:

High EUV source power has been demonstrated with a laser-plasma source exhibiting low debris and high conversion efficiency. This offers a viable path towards successful realization of EUV... View More

Advertisement