IEEE - Institute of Electrical and Electronics Engineers, Inc. - Asymmetrical M2 in solid state laser beam shaping for the line scanning laser annealing

2007 Quantum Electronics and Laser Science Conference

Author(s): Maxim Ya. Darscht ; Yuri V. Miklyaev ; Alexei V. Mikhailov ; Vitalij N. Lissotschenko
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2007
Conference Location: Baltimore, MD, USA, USA
Conference Date: 6 May 2007
Page(s): 1
ISBN (CD): 978-1-55752-834-6
DOI: 10.1109/QELS.2007.4431516
Regular:

A new type of beam shaping system in combination with special characterization of laser parameters provides several mm depth of focus by narrow width and very good homogenization of the... View More

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