IEEE - Institute of Electrical and Electronics Engineers, Inc. - Refractive Gauss-to-Tophat beam shapers improve structure quality and speed in micro-machining

2007 Quantum Electronics and Laser Science Conference

Author(s): Oliver Homburg ; Frank Toennissen ; Heiko Ganser ; Thomas Mitra ; Vitalij Lissotschenko
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2007
Conference Location: Baltimore, MD, USA, USA
Conference Date: 6 May 2007
Page(s): 1
ISBN (CD): 978-1-55752-834-6
DOI: 10.1109/QELS.2007.4431503
Regular:

The transformation principle of a Gaussian beam into a homogeneous top-hat profile by means of free-form refractive micro-optics is reviewed. Various flat-top profiles achieved with different... View More

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