IEEE - Institute of Electrical and Electronics Engineers, Inc. - P1G-4 Characterization of Nanoimprinting Polymer Films Using Picosecond Ultrasonics

2007 IEEE Ultrasonics Symposium

Author(s): J. Bryner ; J. Vollmann ; L. Aebi ; J. Dual ; T. Kehoe ; C.S. Torres
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2007
Conference Location: New York, NY, USA
Conference Date: 28 October 2007
Page(s): 1,409 - 1,412
ISBN (CD): 978-1-4244-1384-3
ISBN (Paper): 978-1-4244-1383-6
ISSN (Paper): 1051-0117
DOI: 10.1109/ULTSYM.2007.354
Regular:

laser acoustic setup is used to determine mechanical properties of polymer thin films which are used for nanoimprinting. Until now mechanical properties like the Young's Modulus or the Poisson... View More

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