IEEE - Institute of Electrical and Electronics Engineers, Inc. - 12E-3 Channel-Select RF MEMS Filters Based on Self-Coupled AlN Contour-Mode Piezoelectric Resonators

2007 IEEE Ultrasonics Symposium

Author(s): Chengjie Zuo ; N. Sinha ; M.B. Pisani ; C.R. Perez ; R. Mahameed ; G. Piazza
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2007
Conference Location: New York, NY, USA
Conference Date: 28 October 2007
Page(s): 1,156 - 1,159
ISBN (CD): 978-1-4244-1384-3
ISBN (Paper): 978-1-4244-1383-6
ISSN (Paper): 1051-0117
DOI: 10.1109/ULTSYM.2007.292
Regular:

This paper reports experimental results on a new class of single-chip multi-frequency channel-select filters based on self-coupled aluminum nitride (AlN) contour-mode piezoelectric resonators. For... View More

Advertisement