IEEE - Institute of Electrical and Electronics Engineers, Inc. - 4D-5 Lateral Field Excited High Frequency Bulk Acoustic Wave Sensors

2007 IEEE Ultrasonics Symposium

Author(s): D.F. McCann ; J.M. Parks ; J.M. McGann ; M.P. da Cunha ; J.F. Vetelino
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2007
Conference Location: New York, NY, USA
Conference Date: 28 October 2007
Page(s): 264 - 267
ISBN (CD): 978-1-4244-1384-3
ISBN (Paper): 978-1-4244-1383-6
ISSN (Paper): 1051-0117
DOI: 10.1109/ULTSYM.2007.77
Regular:

The most popular bulk acoustic wave (BAW) sensor is the quartz crystal microbalance (QCM) which has electrodes on both the top and bottom surfaces of an AT-cut quartz wafer. In the QCM the... View More

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