IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fault Detection using Set Membership Identification for Micro-Electrostatic Actuators

16th IEEE International Conference on Control Applications. Part of IEEE Multi-conference on Systems and Control

Author(s): V. Reppa ; M. Vagia ; A. Tzes
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2007
Conference Location: Singapore, Singapore
Conference Date: 1 October 2007
Page(s): 789 - 794
ISBN (CD): 978-1-4244-0443-8
ISBN (Paper): 978-1-4244-0442-1
DOI: 10.1109/CCA.2007.4389329
Regular:

Fault detection in micro-electrostatic actuators caused primarily by their mechanical components (combs, thin air-damping) is investigated in this article. The system is assumed to be linearly... View More

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