IEEE - Institute of Electrical and Electronics Engineers, Inc. - Development of composite multi-layered PZT thin films for microactuator

2007 IEEE International Symposium on Industrial Electronics

Author(s): L. Li ; S. Aoyagi ; Y. Arai ; N. Tagawa
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2007
Conference Location: Vigo, Spain
Conference Date: 4 June 2007
Page(s): 1,478 - 1,481
ISBN (CD): 978-1-4244-0755-2
ISBN (Paper): 978-1-4244-0754-5
DOI: 10.1109/ISIE.2007.4374820
Regular:

It is necessary to develop high performance microactuator in order to achieve it operating at very low applied voltage. This paper describes the development of composite multi-layered PZT thin... View More

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