IEEE - Institute of Electrical and Electronics Engineers, Inc. - Modeling the Leakage Current of Dielectric Isolation Structures in a High-Voltage Semiconductor Technology

2007 IEEE International Symposium on Industrial Electronics

Author(s): A. Lange ; S. Heinz ; K. Erler ; G. Ebest ; R. Lerner ; U. Eckoldt ; K. Schottmann
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2007
Conference Location: Vigo, Spain
Conference Date: 4 June 2007
Page(s): 1,430 - 1,434
ISBN (CD): 978-1-4244-0755-2
ISBN (Paper): 978-1-4244-0754-5
DOI: 10.1109/ISIE.2007.4374811
Regular:

System-in-package integration becomes more and more important in the growing market of micromechanical sensors and actuators. The most important group of actuators are those based on the... View More

Advertisement