IEEE - Institute of Electrical and Electronics Engineers, Inc. - Optical Properties of Silicon Three-Dimensional Photonic Crystal Fabricated by Self-Aligned Two-Directional Electrochemical Etching Method

2007 4th IEEE International Conference on Group IV Photonics

Author(s): D. Hippo ; Y. Tsudiiya ; H. Mizuta ; K. Urakawa ; N. Koshida ; S. Oda
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2007
Conference Location: Tokyo, Japan
Conference Date: 19 September 2007
Page(s): 1 - 3
ISBN (CD): 978-1-4244-0935-8
ISBN (Paper): 978-1-4244-0934-1
DOI: 10.1109/GROUP4.2007.4347667
Regular:

We have developed a new fabrication process of three-dimensional photonic crystal (3DPC) structures using the self-aligned two-directional electrochemical etching method. We performed optical... View More

Advertisement