IEEE - Institute of Electrical and Electronics Engineers, Inc. - 6Mhz Bulk-Mode Resonator with Q Values Exceeding One Million

TRANSDUCERS '07 & Eurosensors XXI. 2007 14th International Conference on Solid-State Sensors, Actuators and Microsystems

Author(s): L. Khine ; M. Palaniapan ; Wai-Kin Wong
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2007
Conference Location: Lyon, France
Conference Date: 10 June 2007
Page(s): 2,445 - 2,448
ISBN (CD): 1-4244-0842-3
ISBN (Paper): 1-4244-0841-5
ISSN (Electronic): 2164-1641
ISSN (Paper): 2159-547X
DOI: 10.1109/SENSOR.2007.4300665
Regular:

In this paper, we report a 6.3MHz Lamé-mode square resonator with fully differential drive and sense electronics, exhibiting quality factor, Q values exceeding 1 million in ambient pressures as... View More

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