IEEE - Institute of Electrical and Electronics Engineers, Inc. - Application of UV nanoimprint lithography in polymer photonic nano-systems

IEEE Nanotechnology Materials and Devices Conference 2006

Author(s): Choon-Gi Choi ; Young-Tak Han ; Jin Tae Kim
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2006
Conference Location: Gyeongju, South Korea
Conference Date: 22 October 2006
Volume: 1
Page(s): 536 - 537
ISBN (CD): 978-1-4244-0541-1
ISBN (Paper): 978-1-4244-0540-4
DOI: 10.1109/NMDC.2006.4388890
Regular:

We report an application of UV nanoimprint lithography for the fabrication of two-dimensional polymer photonic crystal slab waveguides. With the aid of optimized resin droplet size and imprint... View More

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