IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Novel Protective Cover in Assembling of Micro Components in a SEM Chamber

2006 IEEE International Conference on Automation Science and Engineering

Author(s): A. Cvetanovic ; A. Cvetanovic ; D. Andrijasevic ; I. Giouroudi ; W. Brenner
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2006
Conference Location: Shanghai, China
Conference Date: 8 October 2006
Page(s): 242 - 246
ISBN (CD): 1-4244-0311-1
ISBN (Paper): 1-4244-0310-3
DOI: 10.1109/COASE.2006.326887
Regular:

This paper presents a novel approach to assembly of micro components in a scanning electron microscope (SEM) chamber. A new set, called protective cover for micro components, allows their quick... View More

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