IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Temperature-Gradient Driven Micromirror with Large Angles and High Frequencies

19th IEEE International Conference on Micro Electro Mechanical Systems

Author(s): D. Elata ; R. Mahameed
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2006
Conference Location: Istanbul, Turkey, Turkey
Conference Date: 22 January 2006
Page(s): 850 - 853
ISBN (Paper): 0-7803-9475-5
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2006.1627933
Regular:

In this work we demonstrate that thermoelastic actuation can be used to drive tilting micromirrors to large angles at high frequencies. We present a Single Crystalline Silicon (SCS) micromirror... View More

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