IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and Fabrication of 2D Phononic Crystals in Surface Acoustic wave Micro Devices

19th IEEE International Conference on Micro Electro Mechanical Systems

Author(s): K.-B. Gu ; C.-L. Chang ; J.-C. Shieh ; W.-P. Shih
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2006
Conference Location: Istanbul, Turkey, Turkey
Conference Date: 22 January 2006
Page(s): 686 - 689
ISBN (Paper): 0-7803-9475-5
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2006.1627892
Regular:

In this paper, we present the design and fabrication of innovative phononic crystals integrated with two sets of interdigital (IDT) electrodes for frequency band selection of surface acoustic... View More

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