IEEE - Institute of Electrical and Electronics Engineers, Inc. - High Tuning Range Parallel Plate MEMS Variable Capacitors with Arrays of Supporting Beams

19th IEEE International Conference on Micro Electro Mechanical Systems

Author(s): Bakri-Kassem, M. ; Mansour, R.R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2006
Conference Location: Istanbul, Turkey, Turkey
Conference Date: 22 January 2006
Page(s): 666 - 669
ISBN (Paper): 0-7803-9475-5
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2006.1627887
Regular:

A novel MEMS variable capacitor, built with arrays of supporting beams, is proposed. The supporting beams create different restoring forces, as the top plate deflects, increasing the tuning range... View More

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