IEEE - Institute of Electrical and Electronics Engineers, Inc. - Polycrystalline Diamond RFMEMS Resonators with the Highest Quality Factors

19th IEEE International Conference on Micro Electro Mechanical Systems

Author(s): N. Sepulveda ; D.M. Aslam ; J.P. Sullivan
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2006
Conference Location: Istanbul, Turkey, Turkey
Conference Date: 22 January 2006
Page(s): 238 - 241
ISBN (Paper): 0-7803-9475-5
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2006.1627780
Regular:

This paper reports the highest quality factor (Q) of 116,000 for cantilever beams made from any polycrystalline material, which is also the highest Q for any resonator structure made of... View More

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